The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1984
Filed:
Dec. 09, 1982
Applicant:
Inventors:
Carl-Ernst Eilers, Heidenheim, DE;
Horst Pachonik, Taufkirchen, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041 / ;
Abstract
Device for cathode sputtering of at least two different materials, including a holder, a device for cooling the holder, a heat-conducting layer disposed on the holder, a target being connected to the holder with the heat-conducting layer disposed therebetween, the target being formed of one of the materials to be sputtered and the target having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least one of the blind holes.