The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 1983
Filed:
Jul. 14, 1981
Victor M Benveniste, Magnolia, MA (US);
Eaton Semi-Conductor Implantation Corporation, Beverly, MA (US);
Abstract
Apparatus for treating workpieces by directing a beam at the workpieces, with resultant heating of the workpieces, the apparatus including a moving support element for carrying the workpieces past a source of the beam in both a scanning direction and in a control direction generally orthogonal to the scanning direction, an infrared detector mounted to move in the control direction but not in the scanning direction to receive black body radiation from the workpieces as they pass under the detector, and means to correct black body radiation measurements of said workpieces for noise resulting from dark current variation, whereby an indication of the temperature of the individual workpieces can be obtained as workpiece movements and beam treatment occur.