The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1983
Filed:
Mar. 26, 1982
Applicant:
Inventor:
William I Lehrer, Los Altos, CA (US);
Assignee:
Fairchild Camera and Instrument Corporation, Mountain View, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C03B / ; C03B / ;
U.S. Cl.
CPC ...
65 6053 ; 65-312 ; 65 182 ; 65 6051 ; 65102 ; 427 93 ; 427 99 ; 501 55 ; 65 64 ; 65106 ;
Abstract
The method of the invention provides a thin film deposit of a binary glass for use in integrated circuits which binary glass has a softening or flow point far below temperatures at which glasses normally used in connection with integrated circuits flow. After the binary glass has been deposited (on a semiconductor substrate), it is heated and reflowed. Preferably the glass comprises a mixture of germanium dioxide and silicon dioxide wherein the germanium dioxide is no greater than approximately 50 mole percent of the mixture. Phosphorus is added to the glass film for passivation of the underlying devices.