The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 1983
Filed:
Jun. 18, 1982
Applicant:
Inventors:
John J Macklin, Highlands, NJ (US);
William T Silfvast, Holmdel, NJ (US);
Obert R Wood, II, New York, NY (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; C23F / ; B05D / ; B05B / ;
U.S. Cl.
CPC ...
156643 ; 118620 ; 118715 ; 156646 ; 156656 ; 156345 ; 2041 / ; 2041 / ; 204298 ; 372 62 ; 427 38 ;
Abstract
A segmented plasma excitation and recombination (SPER) device is employed in a deposition scheme in which the plasma generated in the gap between adjacent electrodes is formed into a beam of ions/atoms by flowing a background gas through the gap. The beam strikes a workpiece and deposits a layer of the vaporized electrode material thereon. Also described are techniques where the ions react with workpiece or the background gas to form a layer, as well as where the ions bombard the workpiece to etch away a layer.