The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 1983
Filed:
Sep. 28, 1981
Applicant:
Inventor:
William R Wheeler, Saratoga, CA (US);
Assignee:
Tencor Instruments, Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
3317 / ; 33 / ; 3314 / ;
Abstract
A surface profile measuring instrument, which has a stylus supported on a linear elongated beam for linear scanning. The beam is supported by a mounting mechanism which compensates for tilt by means of a servo. The stylus is pushed and pulled along the beam for linear scans of desired length.