The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 1983
Filed:
Feb. 17, 1981
Applicant:
Inventors:
Ernst W Loebach, Eschen, LI;
Harry L Sawatzki, Vaduz, LI;
Assignee:
Censor Patent-und Versuchsanstalt, Vaduz, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ;
U.S. Cl.
CPC ...
355125 ; 427259 ; 428209 ; 430-5 ;
Abstract
A projection mask and method and apparatus for production thereof comprising a substrate carrying a mask thereon, a cover glass covering the pattern mask and sealed at peripheral edges thereof to the substrate defining a space between the substrate with the mask and the cover glass. A particle-free fluid is provided in this space. A projection printing system projects illumination through such a projection mask into a light sensitive substrate.
Published as: