The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 1983
Filed:
Sep. 22, 1980
Ikuro Kobayashi, Machida, JP;
Kyozo Shimizu, Tokyo, JP;
VLSI Technology Research Association, Tokyo, JP;
Abstract
A method for easily measuring surface temperature distribution of a sample consisting of a plurality of coexisting materials having different radiation factors at a specified temperature and a system for performing the surface temperature measuring method. In this measuring method, a sample is at first kept at a known temperature, and the amount of infrared rays radiated from a plurality of narrow regions divided on the surface of the sample is obtained. This measurement is performed at least twice at two known temperatures and therefrom temperature coefficients of infrared rays of each of a plurality of subdivided regions on the surface of the sample are then obtained. Succeedingly, with a sample being under the measuring condition, the amount of infrared rays radiated from a plurality of regions on the surface of the sample is measured. On the basis of such amounts of infrared rays and the temperature coefficients, respective unknown temperatures of the plurality of regions subdivided on the surface of the sample can be determined.