The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 1983
Filed:
Dec. 24, 1980
Alfred Mack, Poughkeepsie, NY (US);
Brian C O'Neill, Millbrook, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An elevator drive shaft is air pressure counter-balanced and dampened under varying load and system pressure conditions by applying required air pressure to an appropriate side of a piston moving with the drive shaft in an electron beam semiconductor wafer writing apparatus vacuum chamber. Air pressure counterbalancing load forces minimize the actuating forces required to drive the elevator, substantially minimizing vibratory shock and distortion to the electron beam writing system and increasing speed of wafer movement. This permits electron beam writing on one wafer simultaneously with a load/unload operation of a second semiconductor wafer. The counter-balancing load forces also minimize the probability of accidental damage to the system or semiconductor wafers due to uncontrolled high forces or upon mechanical impact between moving and fixed parts, during apparatus malfunction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile