The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 10, 1982

Filed:

Apr. 17, 1980
Applicant:
Inventors:

Martin P Lepselter, Summit, NJ (US);

Simon M Sze, New Providence, NJ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B01J / ; B05D / ; C23C / ;
U.S. Cl.
CPC ...
2957 / ; 29571 ; 148-15 ; 148187 ; 357 15 ; 357 67 ; 357 91 ; 427 84 ;
Abstract

In the fabrication of a metal oxide semiconductor field effect transistor (MOSFET) or of a metal gate field effect transistor (MESFET), characterized by a polycrystalline silicon gate (13) and a short channel of about a micron or less, a sequence of steps is used involving the simultaneous formation of source, drain, and gate electrode contacts by a bombardment with a transition metal, such as platinum, which forms metal-silicide layers (19, 21, 18) on the source and drain regions (10.1, 10.2) as well as the silicon gate electrode (13).


Find Patent Forward Citations

Lepselter, Martin. (1982). Method of making contact electrodes to silicon gate, and source and (U.S. Patent No. 4343082). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4343082

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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