The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 18, 1982

Filed:

Apr. 30, 1980
Applicant:
Inventors:

Erwin Jacobs, Vaterstetten, DE;

Ulrich Schwabe, Munich, DE;

Dezsoe Takacs, Munich, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin & Munich, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C / ;
U.S. Cl.
CPC ...
365185 ; 365184 ; 357 23 ;
Abstract

The invention relates to a MNOS memory cell arrangement in VLSI (very large scale integration) technology comprised of a multi-layer gate insulating layer covering a surface of a semiconductor body in the region between the source and drain zones. In order to avoid breakdowns at the source and drain zone edges before an erasure voltage is attained, the gate electrode is split into two electrodes, which can be operated in different ways and which are superimposed on upon another. These gate electrodes are connected via self-aligned, overlapped contacts. This arrangement resolves 'short channel erasure', even in the case of VLSI technology. The invention can be applied as required to MNOS EEPROM memory devices.


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