The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1982
Filed:
Jun. 30, 1980
Applicant:
Inventors:
Michael Kaplan, Franklin Township, Somerset County, NJ (US);
Eugene S Poliniak, Willingboro, NJ (US);
Dietrich Meyerhofer, Princeton, NJ (US);
Assignee:
RCA Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
A61K / ; G01K / ; H01J / ;
U.S. Cl.
CPC ...
250398 ; 250400 ; 2504922 ; 313439 ;
Abstract
An electron flood exposure apparatus is disclosed which is comprised of an electron gun for providing an electron beam; a dispersing means for converting the electron beam into an electron flood; a post dispersion collimation and acceleration grid; and a target holder for holding a microlithographic resist which is to be exposed by the flood of electrons after collimation and acceleration by the acceleration grid.