The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1982
Filed:
Apr. 06, 1978
Applicant:
Inventors:
Thomas J Sanders, Indialantic, FL (US);
William H White, Indialantic, FL (US);
Assignee:
Harris Corporation, Melbourne, FL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
148-15 ; 148187 ; 357 23 ; 357 59 ; 357 91 ;
Abstract
A radiation hardened CMOS formed by applying a radiation hard gate oxide layer on a silicon substrate, by applying silicon doped aluminum gates on the gate oxide, and by ion implanting and annealing source and drain regions using said gates as masks at a temperature of or below 500 degrees centigrade. Using an N.sup.- type substrate, a P.sup.+ guard ring is formed at the interface of the P.sup.- well of the N channel MOS device and the N.sup.- substrate before the formation of the gate oxide.