The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 1981
Filed:
Apr. 14, 1980
Applicant:
Inventors:
Lawrence Hill, Short Hills, NY (US);
Dennis Garbis, Dix Hills, NY (US);
Robert Heller, Levittown, NY (US);
Assignee:
General Instrument Corporation, Clifton, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B / ; C23C / ;
U.S. Cl.
CPC ...
219 1041 ; 219 / ; 219 1043 ; 118 501 ; 427 451 ; 336 61 ;
Abstract
A method of cooling induction-heated vapor deposition apparatus including an electrically grounded deposition enclosure and a RF induction heating coil having essentially electrically uninsulated turns thereof disposed about the deposition enclosure, comprises the step of spraying deionized liquid having a resistivity of at least 14 megohms-om directly onto the apparatus.