The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1981
Filed:
Feb. 23, 1979
Applicant:
Inventors:
Hans Kramer, Burghausen, DE;
Helmuth Kirschner, Burghausen, DE;
Assignee:
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH, Burghausen, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
5128 / ; 5128 / ; 511314 ; 51266 ;
Abstract
In conventional polishing machines, uneven transmission of pressure causes ifferent degrees of abrasion of the polished discs which results in different thicknesses over one disc and also with respect to other discs in one polishing batch. This problem is solved according to the invention by the provision of soft elastic inserts between the pressure piston and the back of the carrier plate on which the discs to be polished are cemented.