The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1979
Filed:
Nov. 02, 1977
Applicant:
Inventors:
Assignee:
Thomson-CSF, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504 / ; 148175 ; 2504 / ;
Abstract
A system for automatic regulation of the density of a given molecular type at a pre-arranged point in an apparatus called a 'flux or molecular jet', intended to make epitaxy layers. In a vacuum enclosure a probe for mass spectrometry analysis (electrostatic, four pole apparatus) picks up the types projected by evaporating units, ionizes them, filters and detects them as a function of their respective masses. The heating in each unit is regulated by a servo-control loop which contains means for analyzing the type concerned.