The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 1978

Filed:

Jun. 27, 1977
Applicant:
Inventors:

Masahide Okumura, Katsuta, JP;

Yasushi Saito, Mito, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250306 ; 250311 ; 315383 ;
Abstract

A charged particle apparatus wherein a charged particle beam irradiates an object to be observed and secondary emissions such as secondary electrons thus emitted from a surface layer of the object are detected. A signal indicative of the detected secondary emissions is applied to a control grid of a cathode ray tube to modulate an electron beam irradiating a fluorescent screen thereof. A detector detects the electron beam intensity of the cathode ray tube and minimum and maximum or peak values of the detected electron beam intensity are compared with predetermined reference signals to obtain deviation signals indicative of the difference therebetween. The signal applied to the control grid of the cathode ray tube is controlled in accordance with the deviation signals.


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