The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 1977
Filed:
Jan. 19, 1976
Applicant:
Inventors:
Georges Guernet, Meylan, FR;
Georges Lefeuvre, Eybens, FR;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Primary Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
2504 / ; 313149 ; 357 91 ;
Abstract
Implantation of particles and especially ions is carried out by directing a particle beam onto a target and sweeping the beam in two directions at right angles. The target is subjected to a double movement of rotation about two axes which are substantially parallel to the direction of the particle beam. All the points of the target thus describe an epicycloid and are subjected to implantation by the particle beam.