The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 1977
Filed:
Nov. 17, 1975
Applicant:
Inventors:
H David Alcaide, Bedford, MA (US);
James H Ewing, Brockton, MA (US);
Assignee:
MKS Instruments, Inc., Burlington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ; G01N / ;
U.S. Cl.
CPC ...
7339 / ; 2323 / ; 2325 / ; 29593 ; 340236 ; 427 10 ; 427109 ; 427123 ;
Abstract
Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.