The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 1977
Filed:
Apr. 13, 1976
Applicant:
Inventor:
Wolfgang Dietze, Munich, DT;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D / ;
U.S. Cl.
CPC ...
219390 ; 13 25 ; 219531 ; 219539 ; 219553 ;
Abstract
An improved tubular oven adapted for use in diffusion processing of semiconductors whose interior walls are comprised of polycrystalline silicon and whose exterior walls are comprised of phosphorous doped silicon. Block electrical contacts are located at opposed ends of such tubular oven and are comprised of conductive metal and graphite. A layer of thermal insulation circumscribes mid regions of such tubular oven.