The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 1976
Filed:
Jul. 23, 1975
Applicant:
Inventors:
Robert G Mazur, Monroeville, PA (US);
Gilbert A Gruber, Pittsburgh, PA (US);
Robert C Stephenson, North Irwin, PA (US);
Assignee:
Solid State Measurements, Inc., Monroeville, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
51119 ;
Abstract
Apparatus for abrading workpieces, particularly semiconductor wafers, characterized in that the workpiece is disposed on an abrading material in a lapping and polishing tray carried on a generally horizontal support plate. The plate is caused to oscillate or eccentrically rotate by a single, centrally located eccentric arm, the plate being restrained against rotary movement about the eccentric arm by resilient means which extend between stationary pins arranged around the support plate and points on the support plate intermediate the pins.