The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1976
Filed:
Jan. 06, 1975
Applicant:
Inventor:
Stephen E Bernacki, Worcester, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ; G03D / ; G03G / ; G21K / ;
U.S. Cl.
CPC ...
250327 ; 101467 ; 250320 ; 250480 ; 2504 / ; 355 12 ;
Abstract
An electrical voltage is connected between a flexible soft-X-ray mask and a substrate causing the mask to make intimate contact and thereby conform to slight irregularities of the surface of the X-ray sensitive polymer on the substrate to minimize the effect of these irregularities during exposure to soft-X-rays.