The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2026

Filed:

Sep. 27, 2021
Applicant:

Soitec, Bernin, FR;

Inventors:

Bruno Ghyselen, Bernin, FR;

François Darras, Bernin, FR;

Assignee:

Soitec, Bernin, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/20 (2023.01); H10N 30/072 (2023.01); H10N 30/30 (2023.01);
U.S. Cl.
CPC ...
H10N 30/2047 (2023.02); H10N 30/072 (2023.02); H10N 30/308 (2023.02);
Abstract

A composite structure comprises a receiver substrate having at least one cavity defined in the substrate and devoid of solid material or filled with a sacrificial solid material, a single-crystal semiconductor layer disposed on the receiver substrate, the layer having a free surface over the entire extent of the structure and a thickness between 0.1 micron and 100 microns, and a piezoelectric layer secured to the single-crystal semiconductor layer and located between the single-crystal semiconductor layer and the receiver substrate. A device is based on a movable membrane above a cavity, and is formed from the composite structure. A method is used to fabricate the composite structure.


Find Patent Forward Citations

Quick Actions:

Ghyselen, Bruno. (2026). Composite structure for mems applications, comprising a deformable layer and a piezoelectric layer, and associated manufacturing process (U.S. Patent No. 12787648). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12787648

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…