The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Oct. 16, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Dmitry Klochkov, Schwäbisch Gmünd, DE;
Jens Timo Neumann, Aalen, DE;
Thomas Korb, Schwäbisch Gmünd, DE;
Eno Töppe, Aalen, DE;
Johannes Persch, Etgert, DE;
Abhilash Srikantha, Neu-Ulm, DE;
Alexander Freytag, Erfurt, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06T 7/149 (2017.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G06T 7/149 (2017.01); G06T 7/0004 (2013.01); G06T 2207/10028 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/10072 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A method identifies ring structures in pillars of high aspect ratio (HAR) structures. For segmentation of rings, a machine learning-logic is used. A two-step training method for the machine learning logic is described.
Quick Actions:
Klochkov, Dmitry. (2026). Segmentation or cross sections of high aspect ratio structures (U.S. Patent No. 12784228). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12784228
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