The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Feb. 22, 2024
Applied Materials Israel Ltd., Rehovot, IL;
Yuval Alfassi, Rehovot, IL;
Boris Sherman, Rehovot, IL;
Marcelo Bacher, Givatayim, IL;
Ortal Yesodi, Modiin-Maccabim-Reut, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
A method for increasing Signal-to-Noise-Ratio (SNR) of defect detection in inspection of wafers or masks, the method including receiving a current image, receiving a reference image, receiving an indication for existence of a defect in the current image, producing a difference image between the current image and the reference image, performing singular value decomposition (SVD) on the difference image, removing one or more lower-valued singular values from a diagonal middle matrix produced by the SVD, thereby producing a reduced middle matrix, and producing an improved-SNR difference image by reconstructing the difference image using the reduced middle matrix. Related apparatus and methods are also described.
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