The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12782704 B1

Date of Patent:

Nov. 03, 2026

Filed:

Jul. 02, 2024

Auto focus system having a splitter

Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventors:

Menachem Lapid, Rehovot, IL;

Itay Langstadter, Rehovot, IL;

Roy Kaner, Rehovot, IL;

Roman Naidis, Rehovot, IL;

Assignee:

Applied Materials Israel Ltd., Rehovot, IL;

Attorney:

Kilpatrick Townsend & Stockton LLP

Primary Examiner:

Collin X Beatty

Int. Cl.

CPC ...

G02B 21/20 (2006.01); G01N 21/95 (2006.01); G02B 21/06 (2006.01);

U.S. Cl.

CPC ...

G02B 21/20 (2013.01); G02B 21/06 (2013.01); G01N 21/9501 (2013.01);

Abstract

An auto-focus system that includes (a) an illumination path that is configured to illuminate a sample with illumination beams that form multiple spot arrays on the sample that includes an upstream set of spot arrays formed on a first side of an imaging area, and a downstream set of spot arrays formed on another side of the imaging area; (b) a mask that is located at an entrance pupil, the mask comprises a pair of off-axis slits for truncating each collected beam to provide a pair of rays per each collected beam; and (c) a splitter that includes (i) a first reflecting facet that is configured to direct to the first branch, first rays associated with the first collected beams, and (ii) a second reflecting facet that is oriented to the first reflecting facet and is configured to direct to the second branch, rays associated with the second collected beams; wherein the first reflecting facet and the second reflecting facet are located at a reflecting facets location that is outside an image plain, and is located in a location in which there is a separation between the first rays and the second rays.

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Lapid, Menachem. (2026). Auto focus system having a splitter (U.S. Patent No. 12782704). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12782704

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