The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Dec. 28, 2023
Onto Innovation Inc., Wilmington, MA (US);
Alexander George Boosalis, Lake Oswego, OR (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
An optical metrology device collects data in parallel by multiplexing wavelength and associated frequencies using computer control and electro-optics in a wavelength modulator. The wavelength modulator includes a pair of crossed polarizers and an electro-optical modulator, such as a Pockels cell or Faraday rotator, disposed between the polarizers. The electro-optical modulator modulates the polarization state of the light in response to a control signal and produces a different amount of polarization rotation for each wavelength in response to each value of the control signal. The control signal causes the electro-optical modulator to modulate the plurality of wavelengths in the light at different frequencies resulting in the production of a wavelength-frequency multiplex from the wavelength modulator. The effect of the sample on the wavelength-frequency multiplex may be used to determine one or more characteristics of the sample.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile