The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Nov. 18, 2021
Tocalo Co., Ltd., Kobe, JP;
Fujimi Incorporated, Kiyosu, JP;
Yasuhiro Shiojiri, Akashi, JP;
Tatsuo Suidzu, Akashi, JP;
Kensuke Taguchi, Akashi, JP;
Hiroaki Mizuno, Kiyosu, JP;
Takaya Masuda, Kiyosu, JP;
TOCALO CO., LTD., Kobe, JP;
FUJIMI INCORPORATED, Kiyosu, JP;
Abstract
There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile