The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2026
Filed:
Aug. 02, 2023
Ebara Corporation, Tokyo, JP;
Suguru Ozawa, Tokyo, JP;
Yuji Araki, Tokyo, JP;
Yoichi Nakagawa, Tokyo, JP;
Toshifumi Watanabe, Tokyo, JP;
Risa Kimura, Tokyo, JP;
Ryuta Kato, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
There is provided a gas solution supply apparatus capable of preventing bubbles from being generated in use at a point-of-use even if gas solution to be provided to a point-of-use has a high concentration. The gas solution supply apparatusincludes: a gas dissolving unitthat dissolves a source gas in a source liquid to produce a first gas solution; a first gas-liquid separatorthat stores the first gas solution produced and produces a second gas solution through gas-liquid separation of the first gas solution; a pressure reducerthat depressurizes the second gas solution produced in the first gas-liquid separator; and a second gas-liquid separatorthat stores the depressurized second gas solution and produces a third gas solution through gas-liquid separation of the second gas solution. The third gas solution is supplied to a point-of-use.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile