The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2026

Filed:

Apr. 21, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Chih Hsin Yang, Hsinchu County, TW;

Yen Lian Lai, Hsinchu, TW;

Dian-Hau Chen, Hsinchu, TW;

Mao-Nan Wang, Kaohsiung City, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10W 42/00 (2026.01); H10D 84/01 (2026.01); H10D 84/03 (2025.01); H10D 84/83 (2025.01); H10W 20/00 (2026.01); H10W 20/20 (2026.01);
U.S. Cl.
CPC ...
H10W 42/00 (2026.01); H10D 84/0149 (2025.01); H10D 84/0158 (2025.01); H10D 84/038 (2025.01); H10D 84/834 (2025.01); H10W 20/023 (2026.01); H10W 20/20 (2026.01); H10W 42/121 (2026.01);
Abstract

Semiconductor structures and methods for forming the same are provided. A method according to the present disclosure includes forming active regions on a substrate, forming an interconnect structure over the active regions, the interconnect structure including a plurality of dielectric layers and a guard ring disposed within the dielectric layers, etching an opening through the interconnect structure and at least a first portion of the active regions, the opening extending into the substrate, and forming a via structure within the opening. The via structure is surrounded by the guard ring when viewed along a direction perpendicular to a top surface of the substrate.


Find Patent Forward Citations

Quick Actions:

Yang, Chih. (2026). Through via with guard ring structure (U.S. Patent No. 12777934). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12777934

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