The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Apr. 18, 2024
Tower Semiconductor Ltd., Migdal Haemek, IL;
Alex Sirkis, Yokneam Illit, IL;
Julian Guzman, Irvine, CA (US);
Carlo Romano, Vedano al Lambro, IT;
Simone Marchetti, Landriano, IT;
Tower Semiconductor Ltd., Migdal Haemek, IL;
Abstract
There is provided a method that includes (i) removing organic polymer residuals formed on a dry-etched hole that leads to a semiconductor structural element and coating the dry-etched hole with a non-organic polymer to provide a coated hole by exposing the dry-etched hole to a gaseous mixture, the gaseous mixture includes a fluorine based chemical compound, before the removing, the dry-etched hole was least partially coated with dry-etch residuals that comprise the organic polymer residuals; and (ii) coating the coated hole and removing fluorine based chemical compound residuals to provide an additionally coated hole by exposing the first coated hole to a nitrogen based plasma.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile