The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2026
Filed:
Mar. 04, 2024
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Laksheswar Kalita, San Jose, CA (US);
Joseph Behnke, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/32 (2006.01); C23C 18/16 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 18/32 (2013.01); C23C 18/1637 (2013.01); C23C 18/1639 (2013.01); C23C 18/1689 (2013.01); H01J 37/32495 (2013.01);
Abstract
Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by treating the chamber component with an oxidizing agent comprising hydrofluoric acid and/or nitric acid
Kalita, Laksheswar. (2026). Advanced barrier nickel oxide (bnio) coating development for the process chamber components (U.S. Patent No. 12774526). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12774526
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile