The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Apr. 18, 2022
Applicant:

Utac Headquarters Pte. Ltd., Singapore, SG;

Inventors:

Enrique E. Sarile, Jr., Singapore, SG;

Chee Kay Chow, Singapore, SG;

Dzafir Bin Mohd Shariff, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 54/00 (2026.01); B23Q 1/03 (2006.01); H01J 37/32 (2006.01); H10P 72/00 (2026.01); H10P 72/70 (2026.01);
U.S. Cl.
CPC ...
H10P 54/00 (2026.01); B23Q 1/03 (2013.01); H01J 37/32715 (2013.01); H10P 72/0428 (2026.01); H10P 72/7402 (2026.01);
Abstract

A wafer adaptor ring assembly for adapting an adapted sized wafer for plasma dicing by a plasma etch chamber designed for dicing a designed sized wafer, which is larger than the adapted sized wafer is disclosed. The wafer adaptor ring assembly includes a primary wafer ring designed for plasma dicing the designed sized wafer by the plasma, an adhesive sheet attached to a bottom surface of the primary wafer ring, and an adapted sized wafer disposed on the adhesive sheet between the primary wafer ring and the adapted sized wafer. A system for assembling and disassembling the wafer adaptor ring assembly is also disclosed.


Find Patent Forward Citations

Sarile, Jr., Enrique. (2026). Wafer adaptors, including systems and methods, for adapting different sized wafers (U.S. Patent No. 12772771). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12772771

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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