The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Jul. 25, 2023
National University Corporation Tokai National Higher Education and Research System, Nagoya, JP;
Masaru Hori, Nagoya, JP;
Osamu Oda, Nagoya, JP;
Abstract
A generator includes a plasma production tube made of a dielectric at least on a surface of the plasma production tube; an antenna that includes a linear conductor and a dielectric that coats the conductor; a high-frequency power supply connected to the antenna; and a gas supply unit that supplies a gas for generating radicals or ions to an interior of the plasma production tube. The antenna is disposed to extend to a vicinity of the other end of the plasma production tube. The antenna is disposed in a groove formed in an axial direction on an inner surface of the plasma production tube. The antenna is disposed in a groove formed in a circumferential direction on an inner surface of the plasma production tube at least in a portion of the vicinity of the other end of the plasma production tube.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile