The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Feb. 20, 2025
Tokyo Electron Limited, Tokyo, JP;
Hayato Sakai, Miyagi, JP;
Kazuhiro Chiba, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
The disclosed temperature control system includes a first segment, a second segment, and a connector. The first segment includes a first temperature control circuit and a first case accommodating the first temperature control circuit therein, the first temperature control circuit including a first heat exchanger for exchanging heat with a first temperature-controlled medium. The second segment includes a first tank and a first pump in a first circulation system for circulating the first temperature-controlled medium through a first flow path in a first member of a plasma processing apparatus and includes a second case accommodating the first tank and the first pump therein. The connector is a part of the first circulation system, is disposed between the first segment and the second segment, and is connected between the first pump and the first heat exchanger.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile