The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2026

Filed:

Jun. 20, 2024
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Alexander Henstra, Utrecht, NL;

Wouter Verhoeven, Nuenen, NL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/15 (2006.01); H01J 37/14 (2006.01); H01J 37/141 (2006.01); H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 37/141 (2013.01); H01J 2237/04922 (2013.01); H01J 2237/1534 (2013.01);
Abstract

A method for correcting aberrations in a charged particle spectrometer includes receiving, by the charged particle spectrometer, a charged particle beam along an axis and applying a first decapole field to the charged particle beam by a first optical correction element of the charged particle spectrometer. At least a portion of the first optical correction element is positioned before a line focus of the charged particle beam in a dispersion plane on the axis and a cross-over location on the axis such that the first decapole field partially attenuates a fourth order aberration associated with the charged particle beam. The method includes increasing a dispersion and applying a second decapole field to the charged particle beam by a second optical correction element of the spectrometer such that the second optical correction element is positioned after the cross-over such that the second decapole field further attenuates the fourth order aberration.


Find Patent Forward Citations

Henstra, Alexander. (2026). Aberration correction in charged particle spectroscopy (U.S. Patent No. 12770822). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12770822

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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