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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12769211 B1

PDFFull Text
Date of Patent:
Oct. 20, 2026

Filed:

Dec. 07, 2022

Substrate weight measurement apparatus, a substrate processing apparatus including the same, and a method of processing a substrate using the substrate processing apparatus

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sangjine Park, Suwon-si, KR;

Ji Hwan Park, Suwon-si, KR;

Kuntack Lee, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Connor J Tremarche

Int. Cl.
CPC ...
G03F 7/30 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01); G01G 19/40 (2006.01); G01L 13/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/30 (2013.01); G03F 7/40 (2013.01); G03F 7/70608 (2013.01); G01G 19/40 (2013.01); G01L 13/00 (2013.01);
Abstract

A substrate processing apparatus includes a wetting apparatus that supplies a fluid onto a substrate, a substrate weight measurement apparatus that measures a weight of the substrate which has passed through the wetting apparatus, and a drying apparatus that dries the substrate which has passed through the substrate weight measurement apparatus. The substrate weight measurement apparatus includes a measurement chamber providing a measurement space, a measurement stage in the measurement chamber, and a weight sensing sensor that senses the weight of the substrate disposed on the measurement stage.

Find Patent Forward Citations

Park, Sangjine. (2026). Substrate weight measurement apparatus, a substrate processing apparatus including the same, and a method of processing a substrate using the substrate processing apparatus (U.S. Patent No. 12769211). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12769211

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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