The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Sep. 10, 2024
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Saki Miyagawa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 13/00 (2006.01); B08B 1/34 (2024.01);
U.S. Cl.
CPC ...
B08B 13/00 (2013.01); B08B 1/34 (2024.01);
Abstract
An abrasion detection device is provided, including: one or more sensors, outputting a measurement value in accordance with abrasion of a substrate cleaning tool; a pressing mechanism, pressing the substrate cleaning tool against the sensor; and a determination part, performing a determination on whether it is necessary to replace the substrate cleaning tool in accordance with the measurement value from the sensor.
Miyagawa, Saki. (2026). Abrasion detection device, abrasion detection method, substrate cleaning device, and substrate cleaning method (U.S. Patent No. 12766573). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12766573
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