The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Nov. 30, 2022
Tokyo Electron Limited, Tokyo, JP;
Yuichiro Miyata, Koshi City, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A solvent vapor supply apparatus is for supplying solvent vapor to a substrate treatment. The solvent vapor supply apparatus includes a solvent storage which is kept warm at a temperature equal to or higher than a saturation temperature of a solvent stored therein; a precooler which precools the solvent vapor generated in the solvent storage; and a temperature regulator which regulates a temperature of the precooled solvent vapor to a target temperature when the solvent vapor is supplied to the substrate treatment apparatus. The temperature regulator supplies the solvent vapor regulated to the target temperature to the substrate treatment apparatus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile