The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Jul. 12, 2024
Tokyo Electron Limited, Tokyo, JP;
Kazuya Ikeue, Kikuchi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing apparatus configured to process a substrate includes a substrate holder having a substrate holding surface configured to attract and hold the substrate thereon, and including a porous member serving as a substrate attracting member and a chuck base configured to support the porous member; a liquid supply line connected to the substrate holder and configured to supply water to the porous member; an entire surface cleaner configured to clean an entire surface of the substrate holder; an edge cleaner configured to clean an edge portion of the substrate holding surface; and a controller. The controller is configured to cause the processing apparatus to carry out the substrate that has been ground by a grinder from the substrate holder and control the entire surface cleaner and the edge cleaner to simultaneously clean both the entire surface of the substrate holder and the edge portion of the substrate holding surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile