The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Sep. 26, 2023
Tokyo Electron Limited, Tokyo, JP;
Isamu Taoda, Nirasaki City, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate transfer system includes: a transfer device provided with a substrate holder configured to hold a substrate; a lower line camera provided in a transfer path of the substrate to capture an image of a rear surface of the substrate which is being transferred and an image of the substrate holder; an upper line camera provided in the transfer path of the substrate to capture an image of a front surface of the substrate which is being transferred; and a controller that generates a rear-surface image based on the image captured by the lower line camera and generates a front-surface image based on the image captured by the upper line camera.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile