Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device

Abstract

A silicon carbide semiconductor device, including a semiconductor substrate; a first semiconductor region and a second semiconductor region provided in the semiconductor substrate; a plurality of third semiconductor regions selectively provided in the semiconductor substrate, a plurality of first and second trenches penetrating through the second and third semiconductor regions and reaching the first semiconductor region; a plurality of gate electrodes respectively provided in the first trenches; a plurality of conductive films respectively embedded in the second trenches, junction interfaces between the first semiconductor region and the conductive films forming a plurality of Schottky barriers; a first electrode and a second electrode; and a plurality of Schottky barrier diodes that respectively include the plurality of Schottky barriers. Each conductive film includes first and second metal films, the second metal film being closer to a center of the respective second trench and having a lower electrical resistivity than the first metal film.