The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Aug. 08, 2023
Changxin Memory Technologies, Inc., Hefei City, CN;
Qinghua Han, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei City, CN;
Abstract
A semiconductor structure, a method for forming a semiconductor structure, and a memory are provided. The method for forming the semiconductor structure in the disclosure includes: providing a base, the base including a substrate and an insulating dielectric layer, the substrate including a plurality of first trenches spaced apart from each other in a first direction, and the insulating dielectric layer being filled in each of the plurality of first trenches; patterning and etching the base to form a plurality of second trenches spaced apart from each other in a second direction, the second direction intersecting with the first direction; forming a word line structure in each of the plurality of second trenches; forming an air gap between each two adjacent word line structures of a plurality of word line structures; and sealing the air gap.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile