The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Mar. 01, 2023
Tokyo Electron Limited, Tokyo, JP;
Isamu Taoda, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A monitoring substrate for monitoring an inside of a substrate processing apparatus comprises a position detection sensor, a camera, a light source, a storage part and a controller. The position detection sensor configured to detect a position of the monitoring substrate, the camera configured to capture an image of the inside of the substrate processing apparatus maintained at a vacuum atmosphere, the light source configured to illuminate the inside of the substrate processing apparatus, the storage part configured to store the image captured by the camera, and the controller configured to control the camera and the light source.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile