The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2026

Filed:

Aug. 08, 2024
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Venkatakaushik Voleti, San Jose, CA (US);

Mehdi Vaez-Iravani, Los Gatos, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/47 (2006.01); G01N 21/95 (2006.01); H10P 74/00 (2026.01); H10P 74/20 (2026.01); H10W 80/00 (2026.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 21/4738 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G01N 21/9505 (2013.01); H10P 74/203 (2026.01); H10P 74/235 (2026.01); H10P 74/238 (2026.01); H10P 74/277 (2026.01); G01N 2021/8809 (2013.01); G01N 2021/8864 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/06153 (2013.01); G01N 2201/062 (2013.01); H10W 80/161 (2026.01); H10W 80/312 (2026.01); H10W 80/327 (2026.01);
Abstract

An optical inspection system for pre-bonding inspection system includes a stage on which a sample to be inspected is placed, a sensor, optical assemblies, each including an optical head having optics to direct a sample field-of-view (FOV) to a portion of the sample, a first light source configured to illuminate the sample at a first oblique angle, a second light source configured to illuminate the sample at a second oblique angle, a focusing lens to focus a first optical image of the portion of the sample generated by the first light source, and a second optical image of the portion of the sample generated by the second light source onto a segment of the sensor, and a controller configured to combine the first optical image and the second optical image generated by each optical assembly, and generate a map of point defects on the sample.


Find Patent Forward Citations

Voleti, Venkatakaushik. (2026). Multidirectional illumination for hybrid bonding defect detection (U.S. Patent No. 12761160). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12761160

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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