The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Mar. 28, 2024
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Gaurav Pathak, Helsinki, FI;
Mikko Ruoho, Vantaa, FI;
Viljami J. Pore, Helsinki, FI;
Ming Liu, Helsinki, FI;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/34 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45542 (2013.01); C23C 16/342 (2013.01); C23C 16/45553 (2013.01); C23C 16/46 (2013.01);
Abstract
Methods for depositing amorphous boron nitride layers on a substrate are provided. Exemplary methods include providing a boron precursor to a reaction chamber and providing nitrogen reactive species to the reaction chamber.
Pathak, Gaurav. (2026). Method for an amorphous boron nitride layer and associated amorphous boron nitride layers (U.S. Patent No. 12760414). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12760414
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile