The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Dec. 22, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Stephan Six, Augsburg, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A method for depositing a layer () of a coating which is reflective or anti-reflective to DUV radiation onto a surface () of a substrate () for a DUV optical element includes: transferring a coating material (M) into the gas phase in a coating source ('), moving the substrate relative to the coating source along a predetermined movement path (), and varying a coating rate (RB) and/or a rotation speed (ω(t)) of a spin axis () of the substrate during the movement along the movement path. A covering element () is arranged between the coating source (′) and the surface and covers the surface at least partially during the movement of the substrate. Also disclosed is an optical element for the DUV wavelength range, with a substrate and a reflective or anti-reflective coating (B) applied to the substrate, having at least one layer deposited by the disclosed method.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile