The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Oct. 01, 2018
Kla-tencor Corporation, Milpitas, CA (US);
Balajee Raghavan, Simei, SG;
Andrey Yakovlev, Haifa, IL;
KLA Corporation, Milpitas, CA (US);
Abstract
A substrate handling apparatus is provided. The substrate handling apparatus may include a forked structure with one or more support portions which are arranged to provide access to a back surface of a substrate. The substrate handling apparatus may also include a first active support element and a second active support element configured to couple the substrate handling apparatus to the back surface of the substrate. After being placed on the first active support element and the second active support element, the substrate may tilt or lean to create at least a third, passive point of contact along the forked structure. The creation of at least a third, passive point of contact may increase substrate handling and control capabilities with warped substrates.