The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Sep. 14, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Carlo Waldfried, Middleton, MA (US);
Jakub Rybczynski, Arlington, MA (US);
Florentina Popa, Houston, TX (US);
Murat Yaldizli, Westford, MA (US);
Assignee:
Entegris, Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
H10P 72/722 (2026.01);
Abstract
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.