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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12755943 B1

PDFFull Text
Date of Patent:
Oct. 06, 2026

Filed:

Mar. 18, 2024

External cooling assembly for substrate support

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Dinkesh Huderi Somanna, San Jose, CA (US);

Dan Deyo, Austin, TX (US);

Assignee:

Applied Materials Inc., Santa Clara, CA (US);

Attorney:

Moser Taboada

Primary Examiner:

Michael A Band

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); H01J 37/34 (2006.01); H10P 72/72 (2026.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 14/541 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01J 37/3411 (2013.01); H10P 72/72 (2026.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01); H10P 72/722 (2026.01);
Abstract

Embodiments of cooling assemblies for substrate supports are provided herein. In some embodiments, a cooling assembly for a substrate support includes a pedestal having a substrate supporting surface and a backside opposite the substrate supporting surface; and a cooling assembly coupled to the pedestal and configured to provide cooling gas to the backside of the pedestal, wherein the cooling assembly includes: a cooling member having a cooling channel disposed therein; an inlet extending from the cooling channel to an outer surface of the cooling member; and a one or more outlets extending from the cooling channel to an upper surface of the cooling member.

Find Patent Forward Citations

Huderi Somanna, Dinkesh. (2026). External cooling assembly for substrate support (U.S. Patent No. 12755943). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12755943

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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