The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Nov. 16, 2023
Applicant:
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Inventors:
Pavel Adamec, Haar, DE;
Robert Zimmermann, Munich, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1471 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/1532 (2013.01);
Abstract
A deflector for a charged particle beam apparatus is described. The deflector has an axis and is configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector including a plurality of flat coils including two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
Adamec, Pavel. (2026). Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector (U.S. Patent No. 12755923). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12755923
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile